JPH02102654U - - Google Patents
Info
- Publication number
- JPH02102654U JPH02102654U JP1204289U JP1204289U JPH02102654U JP H02102654 U JPH02102654 U JP H02102654U JP 1204289 U JP1204289 U JP 1204289U JP 1204289 U JP1204289 U JP 1204289U JP H02102654 U JPH02102654 U JP H02102654U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- ion
- bias ring
- neutralizing
- introducing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 7
- 239000012535 impurity Substances 0.000 claims description 3
- 230000003472 neutralizing effect Effects 0.000 claims 2
- 238000002513 implantation Methods 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1204289U JPH02102654U (en]) | 1989-02-02 | 1989-02-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1204289U JPH02102654U (en]) | 1989-02-02 | 1989-02-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02102654U true JPH02102654U (en]) | 1990-08-15 |
Family
ID=31221130
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1204289U Pending JPH02102654U (en]) | 1989-02-02 | 1989-02-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02102654U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59196600A (ja) * | 1983-04-21 | 1984-11-07 | 工業技術院長 | 中性粒子注入法およびその装置 |
-
1989
- 1989-02-02 JP JP1204289U patent/JPH02102654U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59196600A (ja) * | 1983-04-21 | 1984-11-07 | 工業技術院長 | 中性粒子注入法およびその装置 |
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